New and Promising Materials from Nitride Compounds. 6. Deposition Methods of c-BN Thin Films.

• 茶谷原 昭義

  大阪工業技術研究所

Bibliographic Information

Other Title

• 窒素化合物のもたらす新素材　６　　ｃ‐ＢＮの気相合成法
• 6 c-BN ノ キソウ ゴウセイホウ

Journal

• The Journal of The Institute of Electrical Engineers of Japan

  The Journal of The Institute of Electrical Engineers of Japan 119 (12), 760-763, 1999

  The Institute of Electrical Engineers of Japan

Keywords

• 立方晶
• 窒化ホウ素
• 密着性
• コーティング
• イオンビーム

Details

• CRID: 1390282679638225920
• NII Article ID: 10004296498
• NII Book ID: AN10432927
• DOI: 10.1541/ieejjournal.119.760
• ISSN: 18814190
• ISSN: 13405551
• NDL BIB ID: 4924000
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4924000
• Web Site: http://www.jstage.jst.go.jp/article/ieejjournal1994/119/12/119_12_760/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles