New Positive-Type Photosensitive Poly(phenylene ether): Poly(2-hydroxy-6-methylphenol-<i>co</i>-2,6-dimethylphenol) with Diazonaphthoquinone

  • Kazumasa Takeshi
    Department of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering, Yamagata UniversityYonezawa, Yamagata
  • Ken-ichi Okuyama
    Department of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering, Yamagata UniversityYonezawa, Yamagata
  • Yoshihiro Ohba
    Department of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering, Yamagata UniversityYonezawa, Yamagata
  • Mitsuru Ueda
    Department of Human Sensing and Functional Sensor Engineering, Graduate School of Engineering, Yamagata UniversityYonezawa, Yamagata

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<jats:title>Abstract</jats:title> <jats:p>A positive working thermally stable and photosensitive polymer based on poly(2-hydroxy-6-methylphenol-co-2,6-dimethyl phenol) (PHP-MP) and 2,3,4-tris[2-diazo-1(2H)-naphthalenone-4-sulfonyloxy] benzophenone (D4SB) as a photoreactive compound has been developed. The copolymer PHP-MP was prepared by oxidative coupling polymerization of 2-(tetrahydropyran-2-yl)oxy-6-methylphenol with 2,6-dimethylphenol, followed by acid treatment. The PHP-MP film showed excellent transparency above 300 nm. A clear positive pattern was obtained when it was exposed to 365 nm light, followed by developing with a 2.38% aqueous tetramethylammonium hydroxide (TMAH) solution at 25 °C.</jats:p>

収録刊行物

  • Chemistry Letters

    Chemistry Letters 28 (5), 393-394, 1999-05-01

    Oxford University Press (OUP)

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