NH4OH-Treated Si(111) Surfaces Studied by Spectroscopic Ellipsometry and Atomic Force Microscopy.
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- Kobayashi Kazuyuki
- Department of Electronic Engineering, Faculty of Engineering, Gunma University, Kiryu–shi, Gunma 376, Japan
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- Adachi Sadao
- Department of Electronic Engineering, Faculty of Engineering, Gunma University, Kiryu–shi, Gunma 376, Japan
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- Takizawa Hidekazu
- Metallic Materials Division, Industrial Research Institute of Nagano Prefecture, Nagano–shi, Nagano 380, Japan
Bibliographic Information
- Other Title
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- NH<sub>4</sub>OH-Treated Si(111) Surfaces Studied by Spectroscopic Ellipsometry and Atomic Force Microscopy
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Abstract
Chemically treated Si(111) surfaces in NH4OH:H2O=1:5 alkaline etchant at 80° C were investigated using spectroscopic ellipsometry (SE) and ex situ atomic force microscopy (AFM). The SE data indicate that when a native oxide layer is partly etch-removed, the resulting surface is very rough. The roughened layer thickness in this case is ~ 4 nm with a void fraction of ~ 40 %, obtained using an effective medium approximation; the AFM image for this sample indicates a roughened surface of ~ 4.5 nm rms. Just after the oxide layer is etched away completely, the SE data yield the spectrum of a nearly flat Si surface. The AFM image confirms a microscopically flat surface (~ 0.2 nm rms) with the emergence of relatively large triangular hollows. With further etching, the Si surface becomes microscopically rougher, as revealed by the SE and AFM.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 35 (2A), 515-519, 1996
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282681222615168
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- NII Article ID
- 210000039787
- 10004349750
- 130004522353
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
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- Text Lang
- en
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed