A Study of Damage Induced in In_<0.52>Al_<0.48>As Surface by Reactive Ion Etching
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- JIANG Gwo-Cherng
- Department of Physics and Mathematics, Chinese Air Force Academy
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収録刊行物
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- Japanese journal of applied physics. Pt. 1, Regular papers & short notes
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Japanese journal of applied physics. Pt. 1, Regular papers & short notes 35 (2), 533-536, 1996-02-01
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詳細情報 詳細情報について
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- CRID
- 1572543024130454912
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- NII論文ID
- 10004349804
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- NII書誌ID
- AA10457675
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- ISSN
- 00214922
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles