Electron Collision Cross Sections for C3F8 Molecule from Electron Transport Coefficients in C3F8-Ar Mixtures

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  • Electron Collision Cross Sections for C<sub>3</sub>F<sub>8</sub> Molecule from Electron Transport Coefficients in C<sub>3</sub>F<sub>8</sub>-Ar Mixtures
  • Electron Collision Cross Sections for C

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We measured the electron transport coefficients, the electron drift velocity W and the product of the gas number density and the longitudinal diffusion coefficient NDL, over the E/N range from 0.03 to 100 Td and gas pressure range from 0.133 to 122kPa in the 0.526% and 5.05% C3F8-Ar mixtures by the double shutter drift tube with variable drift distance.<br>We determined the electron collision cross sections for the C3F8 molecule by the comparison of the present measurement and the calculation of electron transport coefficients in the C3F8-Ar mixtures by using a multi-term Boltzmann equation analysis. Our special attention in the present study was focused upon the vibrational excitation cross sections of the C3F8 molecule.

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