Axial Distribution of Electron Density in Capacitively Coupled RF Discharge Plasma
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- Tada Hiroaki
- Science University of Tokyo
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- Maeda Joji
- Science University of Tokyo
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- Terada Tadashi
- Science University of Tokyo
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- Kogoshi Sumio
- Science University of Tokyo
Bibliographic Information
- Other Title
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- 容量結合型RF放電プラズマの軸方向電子密度分布
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Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 118 (7-8), 897-898, 1998
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679574760448
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- NII Article ID
- 10004440321
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- Data Source
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- JaLC
- Crossref
- CiNii Articles