Breakdown Mechanism of Capacitively Coupled RF Discharges

• Shoji Masafumi

  Yamagata University

• Sato Masumi

  Yamagata University

Bibliographic Information

Other Title

• 容量結合型RF放電の絶縁破壊機構
• ヨウリョウ ケツゴウガタ RF ホウデン ノ ゼツエン ハカイ キコウ

Abstract

Measured breakdown characteristics of capacitively coupled RF discharges are compared with numerical simulations performed under different boundary conditions at the electrode. When a pair of glass-covered aluminum disks are used in the breakdown measurement of N2 and Ar gases at the RF frequency 13.56 MHz, the peculiar bend in the left branch of the minimum of V-shaped breakdown curves is not observed, suggesting the absence of secondary electron emission. For the treated boundary condition of the electron density n, the simulation with its zero gradient gives satisfactory agreement with the experimental V-shaped curves, while the simulation with n=0 is shown to be effective in the region of small electric fields. The development of RF breakdown is explained based on the simulation for spatiotemporal profiles of n.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 118 (9), 936-941, 1998

  The Institute of Electrical Engineers of Japan

Keywords

• N2
• Ar

Details

• CRID: 1390001204598082944
• NII Article ID: 130006838115
• NII Article ID: 10004440429
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms1990.118.9_936
• ISSN: 13475533
• ISSN: 03854205
• NDL BIB ID: 4545606
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4545606
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/118/9/118_9_936/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed