容量結合型RF放電の絶縁破壊機構

• 庄司 正文

  山形大学

• 佐藤 益美

  山形大学

書誌事項

タイトル別名

• Breakdown Mechanism of Capacitively Coupled RF Discharges
• ヨウリョウ ケツゴウガタ RF ホウデン ノ ゼツエン ハカイ キコウ

抄録

Measured breakdown characteristics of capacitively coupled RF discharges are compared with numerical simulations performed under different boundary conditions at the electrode. When a pair of glass-covered aluminum disks are used in the breakdown measurement of N2 and Ar gases at the RF frequency 13.56 MHz, the peculiar bend in the left branch of the minimum of V-shaped breakdown curves is not observed, suggesting the absence of secondary electron emission. For the treated boundary condition of the electron density n, the simulation with its zero gradient gives satisfactory agreement with the experimental V-shaped curves, while the simulation with n=0 is shown to be effective in the region of small electric fields. The development of RF breakdown is explained based on the simulation for spatiotemporal profiles of n.

収録刊行物

• 電気学会論文誌．　Ａ

  電気学会論文誌．　Ａ 118 (9), 936-941, 1998

  一般社団法人 電気学会

キーワード

• 絶縁破壊
• RF放電
• 容量結合型
• 境界条件

詳細情報

• CRID: 1390001204598082944
• NII論文ID: 130006838115
• NII論文ID: 10004440429
• NII書誌ID: AN10136312
• DOI: 10.1541/ieejfms1990.118.9_936
• ISSN: 13475533
• ISSN: 03854205
• NDL書誌ID: 4545606
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4545606
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/118/9/118_9_936/_pdf
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