Transition of Discharge Modes in an RF Discharge Plasma

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  • 高周波放電プラズマの放電モード移行現象
  • コウシュウハ ホウデン プラズマ ノ ホウデン モード イコウ ゲンショウ

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Abstract

The electron temperature, the electron density, the electron energy distribution function (EEDF), the optical emission and the metastable density in capacitively coupled helium RF discharges have been measured as a function of applied RF voltage during the transition from an α to γ mode discharge with varying the gas pressure and frequency. As a result, the transition voltage of the discharge mode decreases with decreasing the sheath width or increasing the plasma density depending on the gas pressure and frequency. When the transition occurs, the low energy region of the measured EEDF rose sharply. In the γ mode, the transition of singlet metastable atoms, He(21S), to triplet metastable atoms, He(23S), by the super elastic collision of the low energy electrons play an important role in the glow region. The transition of an α to γ mode is primarily dependent on the ion plasma frequency.

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