Relaxations and Fine Structures of Electron Energy Distribution in Rare Gasses.

• Yamanashi H.

  Sumitomo Light Metal Industries

• Fukuyama T.

  Chiba Institute of Technology

• Yamamoto K.

  Shikoku University

• Itoh H.

  Sumitomo Light Metal Industries

• Ikuta N.

  Sumitomo Light Metal Industries

Bibliographic Information

Other Title

• 希ガス中電子エネルギー分布の緩和とその微細構造
• キガスチュウ デンシ エネルギー ブンプ ノ カンワ ト ソノ ビサイ コウゾ

Abstract

In general, electron energy distribution (EED) functions in weakly ionized gases are deduced by a Monte-Carlo simulation (MCS) or a. Boltzmann equation analysis (BEA) using a, set of electron collision cross section which describe the occurrence probabilities of two body collisions between electron and atom or molecule.<br>This paper presents the results of detailed MCS and discussions on the position depended EED in non-equilibrium regionn of steady state Townsend discharge. Calculations are carried out in Ne and Ar at 5 Torr and E/p0=10 V/cm-Torr conditions.<br>It is concluded that relaxation and fine structures of EED are caused by not only the inelastic collision but also the elastic collision with Ne and Ar.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 118 (9), 991-996, 1998

  The Institute of Electrical Engineers of Japan

Keywords

• 希ガス
• 電子衝突断面積
• 電子エネルギー分布
• エネルギー緩和
• 微細構造

Details

• CRID: 1390001204598013696
• NII Article ID: 130006838068
• NII Article ID: 10004440566
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms1990.118.9_991
• ISSN: 13475533
• ISSN: 03854205
• NDL BIB ID: 4545615
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I4545615
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms1990/118/9/118_9_991/_pdf
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed