Research on Reflection Characteristics of IC Substrate in Automatic Inspection System by Monte Carlo Method
-
- Suzuki Masafumi
- Akita University
-
- Yoshimura Noboru
- Akita University
-
- Chen Li
- Akita University
書誌事項
- タイトル別名
-
- Research on Reflection Characteristics
この論文をさがす
抄録
The detecting device and the reflection characteristics of the inspected object play an important part in automatic inspection systems. The relations among the detecting lens, the surface roughness, and the reflectances of the inspected object in automatic inspection system are studied by means of Monte Carlo (MC) method in this paper. The automatic inspection system of IC production is taken as the simulation model. Theoretical analysis and simulation results reveal as follows: It is available to examine the relation between the detecting device and the reflection characteristics of the inspected object in an automatic inspection system by MC simulation method. If the inspected objects have the same reflectance and surface roughness, the number of reflection photon bundles is related to the radius of the detecting lens and the shape of the inspected object. A change in specular reflectance can affect the reflection photon bundles much more than that of diffuse reflectance. But with the increasing of the surface roughness, the photon bundles received by the lens decrease, and the influence of specular reflectance on the reflection photon bundles tends to become the same as that of diffuse reflectance.
収録刊行物
-
- 電気学会論文誌. A
-
電気学会論文誌. A 118 (9), 997-1003, 1998
一般社団法人 電気学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282679574724992
-
- NII論文ID
- 130006838069
- 10004440580
-
- NII書誌ID
- AN10136312
-
- ISSN
- 13475533
- 03854205
-
- NDL書誌ID
- 4545616
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可