空間電荷測定PIPWP法とPEA法の比較と電荷量校正

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タイトル別名
  • Comparison between PIPWP Method and PEA Method for Space Charge Measurement and their Charge Calibration
  • クウカン デンカ ソクテイ PIPWPホウ ト PEAホウ ノ ヒカク ト デ

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The principles of both PIPWP and PEA methods for measuring the space charge distributions in solid dielectrics are comparatively analyzed. The relationship between the charge distribution in a specimen and the current signal of PIPWP method or the voltage signal of PEA method are expressed in the time domain and frequency domain. Furthermore, the calibration method of amount of accumulated charge density, using mathematical deconvolution technique, was described for both methods. To compare the two methods, the charge profiles in the electron irradiated PMMA samples were observed. The results of both methods show the exactly same charge profile signal for charge accumulated test sample with the position resolution of 20μm. Furthermore it is discussed on the electric field distribution and electric potential distribution in the sample which were obtained from the measured charge profiles.

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