マイクロアクチュエータ用高磁歪•軟磁性TbFeおよびTbHoFeアモルファス合金スパッタ薄膜

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  • High Magnetostrictive and Soft Magnetic TbFe and TbHoFe Amorphous Alloy Sputtered Films for Micro-actuator Applications
  • マイクロアクチュエータ用高磁歪・軟磁性TbFeおよびTbHoFeアモルファス合金スパッタ薄膜
  • マイクロアクチュエータヨウ コウジワイ ナンジセイ TbFe オヨビ TbHoFe アモルファス ゴウキン スパッタ ハクマク

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Magnetic thin films for magnetic drive type micro-actuators must possess high magnetostriction and soft magnetism simultaneously to ensure large magneto-mechanical coupling. In order to realize such films, binary TbFe amorphous alloy films and ternary TbHoFe amorphous alloy films were prepared by rf-sputtering on glass substrates, where the latter films were aimed to prompt soft magnetism without loosing large magnetostriction by eliminating large local magnetic anisotropy of the former alloy films. The effect of thermal annealing for the internal stress relief on magnetic properties was also examined. By combining suitable choice of composition and heat treatment, films with magnetostriction λ=300×10-6 at H=1kOe and magnetostrictive sensitivity at zero field (dλ/dH)H=0=450×10-9Oe-1 were obtained for a film with Tb32Ho8Fe60 after being annealed at Ta=325°C for 1h in a vacuum, the magnitudes of which are larger than those of TbFe amorphous alloy films. In addition, to check the performance characteristic of micro-actuators, cantilever-type actuators were constructed by depositing films on polyimide foils and the deflection of the free end of the cantilever by applied field was measured, from which these films were proved to be available for micro-actuator.

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