Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation

• SHARMIN M.

収録刊行物

• J.Appl.Phys.

  J.Appl.Phys. 69 2904-, 1991

詳細情報

• CRID: 1572543024094032000
• NII論文ID: 10004442730
• NII書誌ID: AA00693547
• データソース種別:
  • CiNii Articles