Laser-induced Preparation, Laser Melting, and Laser Cleaning of Chromium Microparticles
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- Hiroyasu Sato
- Department of Chemistry for Materials, Faculty of Engineering, Mi’e University
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- Akiyoshi Matsuzaki
- Department of Chemistry for Materials, Faculty of Engineering, Mi’e University
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- Satoru Nishio
- Department of Chemistry for Materials, Faculty of Engineering, Mi’e University
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- Takeshi Yamamoto
- Department of Chemistry for Materials, Faculty of Engineering, Mi’e University
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- Atsushi Morohoshi
- Department of Chemistry for Materials, Faculty of Engineering, Mi’e University
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- Masumi Takahashi
- VLSI Laboratory, FUJITSU VLSI LIMITED
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- Yutaka Miyahara
- Mask Technology Department, Mie, FUJITSU LIMITED
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<jats:title>Abstract</jats:title> <jats:p>Chromium microparticles (20-100 nm) were prepared by 248– nm laser irradiation of deaerated aqueous solutions of chromium (II) dichloride in the presence of sodium formate and sodium polyphosphate, followed by aging. The microparticles transferred onto a silicon substrate were melted by 193– nm laser irradiation. The microparticles on a silicon substrate could be almost completely removed by 308– nm irradiation at the fluence of 0.5 J cm−2 pulse−1.</jats:p>
収録刊行物
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- Chemistry Letters
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Chemistry Letters 27 (9), 917-918, 1998-09-01
Oxford University Press (OUP)
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詳細情報 詳細情報について
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- CRID
- 1360002219109571456
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- NII論文ID
- 10004485421
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- NII書誌ID
- AA00603318
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- ISSN
- 13480715
- 03667022
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