Laser-induced Preparation, Laser Melting, and Laser Cleaning of Chromium Microparticles

• Hiroyasu Sato

  Department of Chemistry for Materials, Faculty of Engineering, Mi’e University

• Akiyoshi Matsuzaki

  Department of Chemistry for Materials, Faculty of Engineering, Mi’e University

• Satoru Nishio

  Department of Chemistry for Materials, Faculty of Engineering, Mi’e University

• Takeshi Yamamoto

  Department of Chemistry for Materials, Faculty of Engineering, Mi’e University

• Atsushi Morohoshi

  Department of Chemistry for Materials, Faculty of Engineering, Mi’e University

• Masumi Takahashi

  VLSI Laboratory, FUJITSU VLSI LIMITED

• Yutaka Miyahara

  Mask Technology Department, Mie, FUJITSU LIMITED

Abstract

Chromium microparticles (20-100 nm) were prepared by 248– nm laser irradiation of deaerated aqueous solutions of chromium (II) dichloride in the presence of sodium formate and sodium polyphosphate, followed by aging. The microparticles transferred onto a silicon substrate were melted by 193– nm laser irradiation. The microparticles on a silicon substrate could be almost completely removed by 308– nm irradiation at the fluence of 0.5 J cm−2 pulse−1.

Journal

• Chemistry Letters

  Chemistry Letters 27 (9), 917-918, 1998-09-01

  Oxford University Press (OUP)

Keywords

• General Chemistry

Details

• CRID: 1360002219109571456
• NII Article ID: 10004485421
• NII Book ID: AA00603318
• DOI: 10.1246/cl.1998.917
• ISSN: 13480715
• ISSN: 03667022
• Web Site: https://academic.oup.com/chemlett/article-pdf/27/9/917/56072590/cl.1998.917.pdf
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  • CiNii Articles