Fabrication of an array of Si nanocrystal dots by the electron stimulated SiO_2-reduction

• TAKEGUCHI Masaki

  National Research Institute for Metals

• FURUYA Kazuo

  National Research Institute for Metals

Bibliographic Information

Other Title

• 電子線励起SiO_2還元によるSiナノ結晶ドット配列の創製

Journal

• 電子顕微鏡

  電子顕微鏡 34 110-, 1999-05-01

Details

• CRID: 1574231873995967872
• NII Article ID: 10004538881
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles