TEM Observation of Structure underneath Indentation Images in Si
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- SHIMATANI J.
- Dept.of Quantum Engg, Nagoya Univ.
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- MATSUMURO A.
- Dept.of Quantum Engg, Nagoya Univ.
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- SUPRIJADI
- Dept.of Quantum Engg, Nagoya Univ.
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- SAKA H.
- Dept.of Quantum Engg, Nagoya Univ.
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- SUGANUMA M.
- Industrial Research Institute, Aichi Prefectural Government
Bibliographic Information
- Other Title
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- Si中の圧痕直下組織の透過電子顕微鏡観察
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Journal
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- 電子顕微鏡
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電子顕微鏡 34 112-, 1999-05-01
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Details 詳細情報について
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- CRID
- 1573668924042543360
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- NII Article ID
- 10004538885
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- NII Book ID
- AN00145000
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- ISSN
- 04170326
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- Text Lang
- ja
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- Data Source
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- CiNii Articles