TEM Observation of Structure underneath Indentation Images in Si

• SHIMATANI J.

  Dept.of Quantum Engg, Nagoya Univ.

• MATSUMURO A.

  Dept.of Quantum Engg, Nagoya Univ.

• SUPRIJADI

  Dept.of Quantum Engg, Nagoya Univ.

• SAKA H.

  Dept.of Quantum Engg, Nagoya Univ.

• SUGANUMA M.

  Industrial Research Institute, Aichi Prefectural Government

Bibliographic Information

Other Title

• Si中の圧痕直下組織の透過電子顕微鏡観察

Journal

• 電子顕微鏡

  電子顕微鏡 34 112-, 1999-05-01

Details

• CRID: 1573668924042543360
• NII Article ID: 10004538885
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles