Investigation of Spatial Resolution in Analysis 1 Electron Lenses

• YANAKA Takashi

  Topcon Electron Beam Services Corporation

• MORIYAMA Kazuhiko

  Topcon Electron Beam Services Corporation

• KOBAYASHI Takashi

  Topcon Electron Beam Services Corporation

• SHIROTA Kohei

  Topcon Electron Beam Services Corporation

Bibliographic Information

Other Title

• 分析分解能向上の検討1 レンズ系の検討

Journal

• 電子顕微鏡

  電子顕微鏡 34 172-, 1999-05-01

Details

• CRID: 1572824499112124672
• NII Article ID: 10004539048
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles