Investigation of Spatial Resolution in Analysis 2 : in the case of EDS and EELS

• KANO F.

  Toshiba

• YAMAMOTO T.

  University of Tokyo, Faculty of Engineering

• IKUHARA Y.

  University of Tokyo, Faculty of Engineering

• MORIYAMA K.

  Topcon Electron Beam Services Co.

• YANAKA T.

  Topcon Electron Beam Services Co.

Bibliographic Information

Other Title

• 分析分解能向上の検討2 : EDS,EELSの実際

Journal

• 電子顕微鏡

  電子顕微鏡 34 173-, 1999-05-01

Details

• CRID: 1573105974088843008
• NII Article ID: 10004539049
• NII Book ID: AN00145000
• ISSN: 04170326
• Text Lang: ja
• Data Source:
  • CiNii Articles