TEM Observation of Solder Joints using Focused Ion Beam Process
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- MATSUKI H.
- LSI Assembly & Packaging Development Div., Fujitsu Limited
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- IBUKA H.
- Dept.of Quantum Eng., Nagoya Univ.
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- SAKA H.
- Dept.of Quantum Eng., Nagoya Univ.
Bibliographic Information
- Other Title
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- FIB加工による半田接合部のTEM観察
Search this article
Journal
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- 電子顕微鏡
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電子顕微鏡 34 196-, 1999-05-01
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Details 詳細情報について
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- CRID
- 1572543024135353728
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- NII Article ID
- 10004539109
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- NII Book ID
- AN00145000
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- ISSN
- 04170326
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- Text Lang
- ja
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- Data Source
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- CiNii Articles