Development of the HD-2000 ultra thin film evaluation system
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- HASHIMOTO T.
- Instrument Division, Hitachi Ltd.
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- NAKAMURA K.
- Central Research Laboratory, Hitachi Ltd.
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- AIZAWA S.
- Instrument Division, Hitachi Ltd.
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- SHIMOYAMA W.
- Instrument Division, Hitachi Ltd.
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- TANAKA H.
- Instrument Division, Hitachi Ltd.
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- SATO H.
- Instrument Division, Hitachi Ltd.
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- OHASHI T.
- Instrument Division, Hitachi Ltd.
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- YOTSUJI T.
- Hitachi Science Systems, Ltd.
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- ISAKOZAWA S.
- Instrument Division, Hitachi Ltd.
Bibliographic Information
- Other Title
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- HD-2000形超薄膜評価装置の開発
Search this article
Journal
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- 電子顕微鏡
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電子顕微鏡 34 200-, 1999-05-01
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Details 詳細情報について
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- CRID
- 1574231873995622912
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- NII Article ID
- 10004539115
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- NII Book ID
- AN00145000
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- ISSN
- 04170326
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- Text Lang
- ja
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- Data Source
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- CiNii Articles