直流測定型広帯域電離真空計の諸特性 [in Japanese] Characterization of the Axial Symmetric Transmission Gauge for the Measurement of Wide Pressure Range by the Faraday Detection [in Japanese]
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The characteristics of a newly developed axial-symmetric transmission gauge (AT gauge) for the measurement of wide pressure range were examined. The secondary electron multiplier used in the previous gauge was replaced by a Faraday cup for analog measurement of ion current. The lower limit of the pressure measurement at present was estimated to be about 10<SUP>-11</SUP> Pa. The sensitivity factor of the AT gauge in the pressure range from 10<SUP>-10</SUP> to 10<SUP>-6</SUP> Pa calibrated by conductance modulation method and in the pressure range from 10<SUP>-8</SUP> to 10<SUP>-2</SUP> Pa calibrated by direct comparison with reference gauges were (2.3±0.04) ×10<SUP>-3</SUP> Pa<SUP>-1</SUP> for hydrogen and (5.8±0.1) ×10<SUP>-3</SUP> Pa<SUP>-1</SUP> for argon, respectively. Uncertainty of the ion current of the AT gauge by the fluctuation of the voltage 1 V of the energy filter was estimated to be about 1%. Long term stability of the electron emission current, intensity of gas phase ion and background signal was estimated to be about 0.03, 0.2 and 6.5%, respectively.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(3), 177-180, 2000-03-20
The Vacuum Society of Japan