活性化反応性蒸着による透明バリアーアルミナ膜の生成と評価 Evaluation of Transparent Barrier Alumina Coating Deposited by Activated Reactive Evaporation
Transparent Al<SUB>2</SUB>O<SUB>3</SUB> films with high gas barrier properties were deposited on a PET film substrate by a web coating method using an activated reactive evaporation (ARE). The web speed was 100 to 700 m/min. The thickness of the Al<SUB>2</SUB>O<SUB>3</SUB> film was 5 to 30 nm. ARE was beneficial for two reasons. One was the enabling of sound Al<SUB>2</SUB>O<SUB>3</SUB> formation, and the other was the smooth winding of the Al<SUB>2</SUB>O<SUB>3</SUB> deposited PET film achieved by neutralizing the negative charges, i.e., secondary electrons resulting from electron beam radiation on the Al evaporation source. The Al<SUB>2</SUB>O<SUB>3</SUB> coated PET film showed an excellent barrier performance of about 1 g/m<SUP>2</SUP> · day for water vapor transmission and about 1.5 cm<SUP>3</SUP>/m<SUP>2</SUP> · day · atm for oxygen transmission, respectively, and an optical transmittance near to that of the uncoated PET. Results from analyses of Auger electron spectroscopy and X-ray diffraction, and observations of transmission electron microscopy and atomic force microscopy of the Al<SUB>2</SUB>O<SUB>3</SUB> films are also described.
真空 43(3), 188-192, 2000-03-20
The Vacuum Society of Japan