原子吸光法を用いたTi-O_2マグネトロンスパッタにおけるTi原子密度測定 Measurement of Ti Atom Densities Using Atomic Absorption Method in Ti-O_2 Magnetron Sputtering

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抄録

Ti atom density distributions on the radial direction in Ti-O<SUB>2</SUB> rf (13.56 MHz) magnetron sputtering were investigated by an atomic absorption method. We also measured Ti atom densities in pure Ar discharge for the comparison with that in Ar-O<SUB>2</SUB> mixture discharge. At a total pressure of 2.7 Pa and rf power of 200 W, Ti atom density in Ar-O<SUB>2</SUB> discharge was nearly two order smaller than that of metallic mode. The maximum value of atom density for radial distance was obtained at the vicinity of the inside of the location with maximum transverse magnetic field strength (r= 30 mm) for all experimental conditions. Dependence of Ti atom density distributions on total pressure of Ar-O<SUB>2</SUB> gases and axial distance were demonstrated.

収録刊行物

  • 真空  

    真空 43(3), 197-200, 2000-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10004561512
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5360772
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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