真空用Al合金の表面酸化膜構造とガス放出特性 Outgassing Rate and Morphology of Surface Oxide Layer of Aluminum Alloy for Vacuum Equipment Use

この論文にアクセスする

この論文をさがす

著者

抄録

One of the practical and low cost treatments, an electrolytic polishing (EP) was applied to aluminum alloys for vacuum equipment use to optimize polishing condition utilizing the Taguchi Methods by small samples. EP samples prepared at the optimal conditions, i.e. high temperature of the polishing liquid and the first rinse water, had outgassing rate as low as chemical polishing (CP). Uniformly thinner and dense surface oxide barrier layer and thicker porous columnar oxide surface layer were the product of the optimal and the starting EP treatments, respectively, and they corresponded to lower and higher outgassing quantity, respectively. Pumping time dependence of outgassing rate <I>q</I> of EP and CP treated chamber samples showed that the formers were higher than the latter, respectively. At ultimate pressure <I>q</I> of EP and CP samples are 3×10<SUP>-12</SUP> Pa·m·s<SUP>-1</SUP> and 1×10<SUP>-12</SUP> Pa·m·s<SUP>-1</SUP>, respectively.

収録刊行物

  • 真空  

    真空 43(3), 209-213, 2000-03-20 

    The Vacuum Society of Japan

参考文献:  9件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10004561540
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5360841
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ