三極管形電離真空計の電極変位と感度係数の関係 [in Japanese] Relationship between Asymmetrical Position of Electrode and the Sensitivity Coefficient of a Triode Type Ionization Gauge [in Japanese]
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Secondary standard ionization vacuum gauge VS-1 is a triode gauge. Simulation of the electrical potential profile of the gauge, electron trajectory emitted from a hot filament, and ion current produced by ionization of gas by the electron assuming a simple electrode geometry was done. The increase in sensitivity coefficient depending on grid potential and the decrease in that depending on filament potential agreed with experimental results by 5%. The increase in sensitivity coefficient depending on filament displacement and ion collector tilting from its regular position was also explained by simulation.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(3), 239-242, 2000-03-20
The Vacuum Society of Japan