三極管形電離真空計の電極変位と感度係数の関係 Relationship between Asymmetrical Position of Electrode and the Sensitivity Coefficient of a Triode Type Ionization Gauge
Secondary standard ionization vacuum gauge VS-1 is a triode gauge. Simulation of the electrical potential profile of the gauge, electron trajectory emitted from a hot filament, and ion current produced by ionization of gas by the electron assuming a simple electrode geometry was done. The increase in sensitivity coefficient depending on grid potential and the decrease in that depending on filament potential agreed with experimental results by 5%. The increase in sensitivity coefficient depending on filament displacement and ion collector tilting from its regular position was also explained by simulation.
真空 43(3), 239-242, 2000-03-20
The Vacuum Society of Japan