Relationship between Asymmetrical Position of Electrode and the Sensitivity Coefficient of a Triode Type Ionization Gauge.

• SUGINUMA Shigemi

  Electrotechnical Laboratory

• HIRATA Masahiro

  Electrotechnical Laboratory

Bibliographic Information

Other Title

• 三極管形電離真空計の電極変位と感度係数の関係
• サンキョクカンケイ デンリ シンクウケイ ノ デンキョク ヘンイ ト カンド ケイスウ ノ カンケイ

Abstract

Secondary standard ionization vacuum gauge VS-1 is a triode gauge. Simulation of the electrical potential profile of the gauge, electron trajectory emitted from a hot filament, and ion current produced by ionization of gas by the electron assuming a simple electrode geometry was done. The increase in sensitivity coefficient depending on grid potential and the decrease in that depending on filament potential agreed with experimental results by 5%. The increase in sensitivity coefficient depending on filament displacement and ion collector tilting from its regular position was also explained by simulation.

Journal

• Shinku

  Shinku 43 (3), 239-242, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679040459904
• NII Article ID: 10004561596
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.239
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 5360898
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5360898
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed