Enhancement of h-BN Surface Segregation.
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- KIM Y. S.
- National Research Institute of Metals
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- TOSA Masahiro
- National Research Institute of Metals
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- KASAHARA Akira
- National Research Institute of Metals
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- YOSHIHARA Kazuhiro
- National Research Institute of Metals
Bibliographic Information
- Other Title
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- 六方晶窒化ホウ素の表面偏析の促進
- 6ポウショウ チッカ ホウソ ノ ヒョウメンヘンセキ ノ ソクシン
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Abstract
The synthesis of uniform hexagonal boron nitride layer was enhanced by surface segregation method using a r. f. magnetron sputtering system utilizing a helicon wave nitrogen plasma and in-situ annealing in an ultrahigh vacuum. Scanning Auger spectroscopy and X-ray photoelectron spectroscopy analyses showed that the deposited film surface was almost covered with the h-BN layer segregated after the annealing at 800 K. The surface of h-BN layer was found to have the attractive force less than 1 nN and the good insulating property up to 3 V. These surface properties can be applied to fabricate nano scale structure and electric micro devices as an advanced substrate.
Journal
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- Shinku
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Shinku 43 (3), 243-246, 2000
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679040458752
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- NII Article ID
- 10004561601
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 5360907
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed