パルスレーザー堆積法を用いて作製した積層型透明導電膜 Laminated Transparent Conducting Thin Films Prepared by Pulsed Laser Deposition

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著者

    • 鈴木 晶雄 SUZUKI Akio
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 振木 昌成 FURIKI Masanari
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 青木 孝憲 [他] AOKI Takanori
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 松下 辰彦 MATSUSHITA Tatsuhiko
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 奥田 昌宏 OKUDA Masahiro
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

抄録

There are many unsettled questions for transparent conducting ITO thin films if used as electronic devices : expensive and weak in durability to reduction gas. In order to improve these disadvantageous points, AZO (ZnO : Al<SUB>2</SUB>O<SUB>3</SUB>) was deposited on the ITO layer by PLD method and laminated transparent conducting films with a structure of ITO + AZO were prepared. It was found that if the film thickness of the upper AZO layer increased, the sheet resistance decreased. At the same time, the increase of averaged transmittance in the visible wavelength region (400700 nm) due to an anti-reflection effect caused by two layer structure of ITO +AZO was recognized. Moreover, it was found from SEM and AFM observations that the surface randomness was improved from 4.54 nm for the ITO single layer to 2.89 nm for the ITO + AZO (120 nm) structure.

収録刊行物

  • 真空  

    真空 43(3), 268-272, 2000-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10004561654
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5360955
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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