容量結合型高周波放電における陰極表面材質の影響 Effects of Cathode Material on Capacitive Coupling RF Plasma
In this paper dependence of electrode material on plasma parameter was studied. By changing the electrode material from aluminum to graphite, electron densities were measured with a self-compensated Langmuir probe in an asymmetrical parallel plate radio frequency plasma reactor. The results show that the electron densities with the aluminum cathode are greater than that with the graphite cathode.
真空 43(3), 314-316, 2000-03-20
The Vacuum Society of Japan