Effects of Cathode Material on Capacitive Coupling RF Plasma.

• KUBO Takashi

  Department of Electronics, Faculty of Engineering, Hiroshima Kokusai Gakuin University

• TANAKA Makoto

  Department of Electronics, Faculty of Engineering, Hiroshima Kokusai Gakuin University

Bibliographic Information

Other Title

• 容量結合型高周波放電における陰極表面材質の影響
• ヨウリョウ ケツゴウガタ コウシュウハ ホウデン ニ オケル インキョク ヒョウメン ザイシツ ノ エイキョウ

Abstract

In this paper dependence of electrode material on plasma parameter was studied. By changing the electrode material from aluminum to graphite, electron densities were measured with a self-compensated Langmuir probe in an asymmetrical parallel plate radio frequency plasma reactor. The results show that the electron densities with the aluminum cathode are greater than that with the graphite cathode.

Journal

• Shinku

  Shinku 43 (3), 314-316, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204063598592
• NII Article ID: 10004561749
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.314
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 5361466
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5361466
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed