超臨界二酸化炭素(CO_2)で処理した超高真空装置用アルミニウム表面の汚染除去と評価 Surface Cleanliness Evaluation of Aluminum for Ultra-high Vacuum Material Treated in Supercritical Fluids CO_2
Generally, contaminations on aluminum surface are hydrocarbons, but they are not clarified yet. So, we applied supercritical fluids (SCF) carbondioxide (CO<SUB>2</SUB>) treatment on aluminum where triglyceride was deposited. Contamination removing rate was evaluated with FT-IR.<BR>(1) The peaks of triglyceride were -CH<SUB>3</SUB> and -CH<SUB>2</SUB>- at 2920 cm<SUP>-1</SUP> and 2850 cm<SUP>-1</SUP>, respectively.<BR>(2) Obtained standard lines for evalution are proportional to a square root of contamination of triglyceride in the range from 1% to 30% density. The precision of this standard lines is ±1213%.<BR>(3) Contamination removing rate is in the range of 6798%.Therefore, SCF CO<SUB>2</SUB> is effective to remove triglyceride on the aluminum surface.
真空 43(3), 341-344, 2000-03-20
The Vacuum Society of Japan