平滑加工チタニウムの表層解析とガス放出特性の相関 Characteristics of Outgassing Properties from Titanium Surfaces with Different Treatments

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In order to study a surface chemical affinity of gas species, we applied thermal desorption spectroscopy (TDS) to modified surfaces of titanium. The surfaces were prepared with different treatments such as buff polishing, chemical polishing, electrical polishing, mechano-chemical polishing and emery polishing with water and carbontetrachloride, respectively as a comparison. Outgassing properties of H2 from polished titanium surfaces have been shown the significant difference on TDS spectra. For higher temperatures than 500°C, TDS spectrum of H2 increased remarkably, and C and O Auger signals decreased.

収録刊行物

  • 真空  

    真空 43(3), 345-348, 2000-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10004561821
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5361578
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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