平滑加工チタニウムの表層解析とガス放出特性の相関 Characteristics of Outgassing Properties from Titanium Surfaces with Different Treatments
In order to study a surface chemical affinity of gas species, we applied thermal desorption spectroscopy (TDS) to modified surfaces of titanium. The surfaces were prepared with different treatments such as buff polishing, chemical polishing, electrical polishing, mechano-chemical polishing and emery polishing with water and carbontetrachloride, respectively as a comparison. Outgassing properties of H2 from polished titanium surfaces have been shown the significant difference on TDS spectra. For higher temperatures than 500°C, TDS spectrum of H2 increased remarkably, and C and O Auger signals decreased.
真空 43(3), 345-348, 2000-03-20
The Vacuum Society of Japan