プラズマ振動の励起による電子密度の磁気プローブ計測 Magnetic Probe Measurements of Electron Density by Excitation of Plasma Oscillation
Electron density in nitrogen glow discharge plasma was determined by measuring frequency of plasma oscillation. Plasma oscillation was excited in the glow discharge by using internal cathode placed close to anode. Signal intensity of plasma oscillation was detected by magnetic probe, i.e. magnetic pick-up coil connected to spectrum analyzer.<BR>Spectrum due to the plasma oscillation was clearly observed, and the frequency shifted according to the change of discharge parameters. The electron density measured by the present method was compared with the data of electro-static probe. The present data well agreed with that of the electro-static probe.
真空 43(3), 349-352, 2000-03-20
The Vacuum Society of Japan