円筒誘導結合型プラズマの放電モード遷移の研究 [in Japanese] Study on Discharge Mode Transitions of Cylindrical Inductively Coupled Plasmas [in Japanese]
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The mode transitions of cylindrical inductively coupled plasmas have been studied on the basis of the equivalent circuit model included both inductive (H-mode) and capacitive (E-mode) coupling branches. The pure inductive discharge is considered as a co-axial one-turn secondary winding of an air-core transformer, while a capacitive current is assumed to flow from a high voltage coil plate to a grounded electrode via a quartz glass and sheaths. The dependence of the plasma density on RF voltage amplitude is calculated as a function of the ratio of angular excitation frequency to electron-neutral collision frequency, ω/ν<SUB>c</SUB>. It is found that the E-H mode jump with the hysteresis phenomenon occurs at ω/ν<SUB>c</SUB>>1, on the other hand the plasma density continuously increases from E- to H-mode at ω/ν<SUB>c</SUB><1.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(3), 353-356, 2000-03-20
The Vacuum Society of Japan