円筒誘導結合型プラズマの放電モード遷移の研究 Study on Discharge Mode Transitions of Cylindrical Inductively Coupled Plasmas

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The mode transitions of cylindrical inductively coupled plasmas have been studied on the basis of the equivalent circuit model included both inductive (H-mode) and capacitive (E-mode) coupling branches. The pure inductive discharge is considered as a co-axial one-turn secondary winding of an air-core transformer, while a capacitive current is assumed to flow from a high voltage coil plate to a grounded electrode via a quartz glass and sheaths. The dependence of the plasma density on RF voltage amplitude is calculated as a function of the ratio of angular excitation frequency to electron-neutral collision frequency, ω/ν<SUB>c</SUB>. It is found that the E-H mode jump with the hysteresis phenomenon occurs at ω/ν<SUB>c</SUB>>1, on the other hand the plasma density continuously increases from E- to H-mode at ω/ν<SUB>c</SUB><1.

収録刊行物

  • 真空  

    真空 43(3), 353-356, 2000-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10004561835
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5361598
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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