円筒誘導結合型プラズマの放電モード遷移の研究 Study on Discharge Mode Transitions of Cylindrical Inductively Coupled Plasmas
The mode transitions of cylindrical inductively coupled plasmas have been studied on the basis of the equivalent circuit model included both inductive (H-mode) and capacitive (E-mode) coupling branches. The pure inductive discharge is considered as a co-axial one-turn secondary winding of an air-core transformer, while a capacitive current is assumed to flow from a high voltage coil plate to a grounded electrode via a quartz glass and sheaths. The dependence of the plasma density on RF voltage amplitude is calculated as a function of the ratio of angular excitation frequency to electron-neutral collision frequency, ω/ν<SUB>c</SUB>. It is found that the E-H mode jump with the hysteresis phenomenon occurs at ω/ν<SUB>c</SUB>>1, on the other hand the plasma density continuously increases from E- to H-mode at ω/ν<SUB>c</SUB><1.
真空 43(3), 353-356, 2000-03-20
The Vacuum Society of Japan