誘導結合型プラズマにおける高周波電流測定の改善とその応用

• 川田 博昭

  大阪府立大学工学部電子物理工学科

• 彌永 英倫

  大阪府立大学工学部電子物理工学科

• 松永 崇

  大阪府立大学工学部電子物理工学科

• 村田 顕二

  大阪府立大学工学部電子物理工学科

書誌事項

タイトル別名

• Improvement of Radio Frequency Current Measurement for Inductive Coupled Plasma and its Applications.
• ユウドウ ケツゴウガタ プラズマ ニ オケル コウシュウハ デンリュウ ソクテイ ノ カイゼン ト ソノ オウヨウ

抄録

Both the current flowing through an antenna coil and the voltage supplied to the coil were measured for Ar inductive coupled plasmas (ICP) at a pressure of 13 Pa. By using the cancel circuit we measured the difference of the antenna coil currents between no plasma load and ICP. The measurement system was improved in order to reduce both radio frequency (RF) noises and waveform distortions. The impedance is presented when the cancel circuit is used. A simple method to obtain the value of the coupling coefficient is presented. The current measured with the cancel circuit could be related to the plasma current much better than that without the cancel circuit. The values of the coupling coefficient increased as the RF power increased, and ranged between 0.3 and 0.5 in our experiment.

収録刊行物

• 真空

  真空 43 (3), 357-360, 2000

  一般社団法人 日本真空学会

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

詳細情報

• CRID: 1390282679040287104
• NII論文ID: 10004561842
• NII書誌ID: AN00119871
• DOI: 10.3131/jvsj.43.357
• ISSN: 18809413
• ISSN: 05598516
• NDL書誌ID: 5361622
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5361622
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可