Quick Calibration of Pressure Sensitivity for Residual Gas Analyzer Using Standard Gas Mixture

• NISHIWAKI Michiru

  Department of Accelerator Science, The Graduate University for Advanced Studies

• KATO Shigeki

  High Energy Accelerator Research Organization

Bibliographic Information

Other Title

• 標準混合ガスを用いた残留ガス質量分析計の迅速な感度校正法

Journal

• 真空

  真空 43 (3), 381-, 2000-03-20

Details

• CRID: 1571417124222787328
• NII Article ID: 10004561883
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles