Outgassing due to the Pump Memory Effect of a Sputter-ion Pump

• SHIMAMOTO Masayuki

  High Energy Accelerator Research Organization

• HISAMATSU Hiromi

  High Energy Accelerator Research Organization

• KANAZAWA Ken-ichi

  High Energy Accelerator Research Organization

Bibliographic Information

Other Title

• イオンポンプの履歴と排気時の放出ガス

Journal

• 真空

  真空 43 (3), 409-, 2000-03-20

Details

• CRID: 1571698599200141312
• NII Article ID: 10004561972
• NII Book ID: AN00119871
• ISSN: 05598516
• Text Lang: ja
• Data Source:
  • CiNii Articles