Work Function Reduction by Cu Segregation on Ti Film with Different Concentration
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- YOSHITAKE Michiko
- National Research Institute for Metals
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- APARNA Yarrama-Reddy
- National Research Institute for Metals
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- YOSHIHARA Kazuhiro
- National Research Institute for Metals
Bibliographic Information
- Other Title
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- Ti膜上でのCuの偏析濃度と仕事関数低下量との相関
Search this article
Journal
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- 真空
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真空 43 (3), 416-, 2000-03-20
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Details 詳細情報について
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- CRID
- 1570291224316588288
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- NII Article ID
- 10004561989
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- NII Book ID
- AN00119871
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- ISSN
- 05598516
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- Text Lang
- ja
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- Data Source
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- CiNii Articles