Present Situation and Problems of Dry Pumps

• SAWADA Tadashi

  Department of Mechanical Engineering, Faculty of Engineering and Resource Science Akita University

Bibliographic Information

Other Title

• ドライポンプ　　各種ドライポンプの現状と課題
• カイセツ カクシュ ドライポンプ ノ ゲンジョウ ト カダイ

Journal

• Shinku

  Shinku 43 (5), 557-563, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679040347392
• NII Article ID: 10004562317
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.557
• ISSN: 18809413
• ISSN: 05598516
• ISSN: http://id.crossref.org/issn/05598516
• NDL BIB ID: 5359782
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5359782
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles