アルミニウム合金を用いたドライ真空ポンプと反応性ガスの排気 [in Japanese] Roots Dry Vacuum Pump Made of Aluminum Cast Alloy and Reactive Gas Pumping [in Japanese]
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Newly released roots type dry vacuum pumps (PDR-C series; ULVAC JAPAN, Ltd.) are described.<BR>Main parts of the pumps consist of aluminum cast alloys. Their high thermal conductivity makes it easy to regulate operation temperature by changing cooling water path. These models have high and low temperature operation modes.<BR>High temperature operation (>120°C) are suitable for Si<SUB>3</SUB>N<SUB>4</SUB> CVD, NF<SUB>3</SUB> cleaning and low temperature operation (<100°C) for Cu-CVD, W-CVD processes.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(5), 564-571, 2000-05-20
The Vacuum Society of Japan