Dry Pump. Roots Dry Vacuum Pump Made of Aluminum Cast Alloy and Reactive Gas Pumping.

DOI Web Site

Bibliographic Information

Other Title
  • ドライポンプ　　アルミニウム合金を用いたドライ真空ポンプと反応性ガスの排気
  • アルミニウム ゴウキン オ モチイタ ドライ シンクウ ポンプ ト ハンノウセイ ガス ノ ハイキ

Search this article

Abstract

Newly released roots type dry vacuum pumps (PDR-C series; ULVAC JAPAN, Ltd.) are described.<BR>Main parts of the pumps consist of aluminum cast alloys. Their high thermal conductivity makes it easy to regulate operation temperature by changing cooling water path. These models have high and low temperature operation modes.<BR>High temperature operation (>120°C) are suitable for Si3N4 CVD, NF3 cleaning and low temperature operation (<100°C) for Cu-CVD, W-CVD processes.

Journal

  • Shinku

    Shinku 43 (5), 564-571, 2000

    The Vacuum Society of Japan

Keywords

Details 詳細情報について

Report a problem

Back to top