繊維強化プラスチック(FRP)製真空チャンバーの特性 [in Japanese] Characteristics of Fiber Reinforced Plastic(FRP)Vacuum Chamber [in Japanese]
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A diode rf plasma reactor made of vinyl ester fiber-reinforced plastics (FRP) was manufactured. Evacuation and etching characteristics of the reactor were investigated. Pyromellitic disnhydride-oxydianiline (PMDA-ODA) polyimide film was etched in the mixtured oxygen and nitrogen trifluoride gas plasma. The etch rate of the polyimide film was 0.9μm/min at 1.2 kW of rf power. Although the reactor was etched slightly with oxygen plasma, this plasma reactor will be utilized in the field of polymer etching.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(5), 595-598, 2000-05-20
The Vacuum Society of Japan