繊維強化プラスチック(FRP)製真空チャンバーの特性 Characteristics of Fiber Reinforced Plastic(FRP)Vacuum Chamber
A diode rf plasma reactor made of vinyl ester fiber-reinforced plastics (FRP) was manufactured. Evacuation and etching characteristics of the reactor were investigated. Pyromellitic disnhydride-oxydianiline (PMDA-ODA) polyimide film was etched in the mixtured oxygen and nitrogen trifluoride gas plasma. The etch rate of the polyimide film was 0.9μm/min at 1.2 kW of rf power. Although the reactor was etched slightly with oxygen plasma, this plasma reactor will be utilized in the field of polymer etching.
真空 43(5), 595-598, 2000-05-20
The Vacuum Society of Japan