パルスレーザー堆積法を用いて磁場下で作製した透明導電膜 Transparent Conducting Thin Films Prepared by Pulsed Laser Deposition in Magnetic Field
The pulsed laser deposition (PLD) method has furnished useful means to fabricate films with noble and highly efficient properties. However, when the equipment with an excimer laser of intricate and expensive features is used to fabricate the films, it will bring about the raising of cost. Therefore, we paid attention to the PLD method by Nd : YAG laser with simple and inexpensive features and performed to prepare films in magnetic fields using Nd : YAG laser (fundamental 1064 nm and SHG 532 nm), in which it was aimed to suppress the generation of droplet and to shorten the preparation time. From these results, it was confirmed that by preparing in the magnetic field, it was able to fabricate the films with properties of low resistivity and high transparency. Moreover, from XRD measurements and SEM observation, the reforming of surface morphology due to improvement in crystallinity, was found. These effects were remarkable in the films prepared using the wavelength of 532 nm.
真空 43(5), 611-615, 2000-05-20
The Vacuum Society of Japan