パルスレーザー堆積法を用いて磁場下で作製した透明導電膜 Transparent Conducting Thin Films Prepared by Pulsed Laser Deposition in Magnetic Field

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著者

    • 鈴木 晶雄 SUZUKI Akio
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 米山 佳孝 YONEYAMA Yoshitaka
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 青木 孝憲 [他] AOKI Takanori
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 松下 辰彦 MATSUSHITA Tatsuhiko
    • 大阪産業大学工学部電気電子工学科 Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
    • 奥田 昌宏 OKUDA Masahiro
    • 大阪府立大学工学部電子物理工学科 Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

抄録

The pulsed laser deposition (PLD) method has furnished useful means to fabricate films with noble and highly efficient properties. However, when the equipment with an excimer laser of intricate and expensive features is used to fabricate the films, it will bring about the raising of cost. Therefore, we paid attention to the PLD method by Nd : YAG laser with simple and inexpensive features and performed to prepare films in magnetic fields using Nd : YAG laser (fundamental 1064 nm and SHG 532 nm), in which it was aimed to suppress the generation of droplet and to shorten the preparation time. From these results, it was confirmed that by preparing in the magnetic field, it was able to fabricate the films with properties of low resistivity and high transparency. Moreover, from XRD measurements and SEM observation, the reforming of surface morphology due to improvement in crystallinity, was found. These effects were remarkable in the films prepared using the wavelength of 532 nm.

収録刊行物

  • 真空  

    真空 43(5), 611-615, 2000-05-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10004562424
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    05598516
  • NDL 記事登録ID
    5359870
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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