An Outline of Cleaning Technology

• MAMIYA Fujio

  Mamiya Consulting Office

Bibliographic Information

Other Title

• 洗浄技術概論
• センジョウ ギジュツ ガイロン

Journal

• Shinku

  Shinku 43 (6), 631-641, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204065603456
• NII Article ID: 10004562434
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.631
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 5391732
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5391732
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles