Plasma Cleaning and Applications for Semiconductor Assembly Process

• HAJI Hiroshi

  Factory Automation Research Laboratory, Kyushu Matsushita Electric Co., Ltd.

• ARITA Kiyoshi

  Factory Automation Research Laboratory, Kyushu Matsushita Electric Co., Ltd.

Bibliographic Information

Other Title

• プラズマ洗浄と半導体組み立て工程への応用
• プラズマ センジョウ ト ハンドウタイ クミタテ コウテイ エ ノ オウヨウ

Journal

• Shinku

  Shinku 43 (6), 647-653, 2000

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390282679042316032
• NII Article ID: 10004562443
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.43.647
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 5391744
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I5391744
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles