排気の繰返しによるステンレス鋼のベーキング前ガス放出速度の低減 [in Japanese] Reduction of Outgassing Rate before Baking from Stainless Steel by Evacuation Cycles [in Japanese]
Access this Article
Search this Article
Effect of the number of evacuation cycles at room temperature on outgassing rate before baking was investigated. A test chamber was fabricated of type-304 stainless steel and finished with buff and electrolytic polishing. Seven succesive evacuation cycles without baking reduced the outgassing rate before baking to that obtained after several evacuation cycles including baking at 150 or 200°C (i.e. the well degassed state). Outgassing rate before baking decreased with time <I>t</I> at a rate of <I>t</I><SUP>-α</SUP>, where α was 1.05 in the first evacuation cycle and increased up to 1.3 after evacuation cycles with baking at 150, 200 or 450°C. This increase in a indicates that the evacuation cycle changes the distribution of adsorption sites with different activation energies of desorption.
- Journal of the Vacuum Society of Japan
Journal of the Vacuum Society of Japan 43(8), 820-823, 2000-08-20
The Vacuum Society of Japan