ラングミューアプローブ法と発光分光法による電子サイクロトロン共鳴メタンプラズマの測定 Measurement of ECR-CH_4 Plasma using Langmuir Probe and an Optical Emission Spectroscopy
The electron energy distribution function, <I>F (E) </I>, in ECR-CH<SUB>4</SUB> plasma was measured with the Langmuir probe technique. Increase in microwave power expanded tail of <I>F (E) </I> in the high energy region; the electron density of the high energy region (<I>E</I>> 20 eV) in methane plasma increased non-linearly against the power in the range between 100 W and 400 W. Peak intensities of <I>H</I><SUB>α</SUB>, <I>H</I><SUB>β</SUB>, and CH<SUP>*</SUP> determined from optical emission spectra (370-670 nm) also increased non-linearly with microwave power. The behavior can be explained by contribution of high-energy tail of <I>F (E) </I> to the electron impact dissociation of CH<SUB>3</SUB> radicals.
真空 42(5), 565-571, 1999-05-20
The Vacuum Society of Japan